Parameters
Key Parameters | Resolution | 1.0 nm @ 15 kV, SE 1.5 nm @ 1 kV, SE0.8 nm @ 30 kV, STEM |
Acceleration voltage | 20 V ~ 30 kV | |
Magnification | 1 ~ 2,500,000 x | |
Electron Gun | High brightness Schottky Field Emission Electron Gun | |
Sample Chamber | Vacuum System | Fully automatic control, oil-free vacuum system |
Camera | Dual Cameras (Optical navigation + in-bin monitor) |
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Distance | X: 120 mm, Y: 115 mm, Z: 50 mm T: -10°~ +90°, R: 360° (*Optional extra-large bin version available) |
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Detectors and Extensions | Standard | The high-angle electronic detector in the lens column The side low-angle electronic detector |
Optional | Flush-mounted mid-angle backscattered electron detector Automatic retractable scanning transmission electron microscopy (STEM) detector Sample exchange chamber High-speed beam gate and electron beam exposure Energy dispersive spectroscopy (EDS/EDX) Electron Backscatter Diffraction (EBSD) Electron-beam-induced current (EBIC) Cathodoluminescence (CL) High and low temperature in-situ stretching table nanoManipulator Large-Scale Image StitchingTrackball & Knob Control Panel |
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Software | Operating System | Windows |
Navigation | Optical Navigation, Gesture Quick Navigation | |
Automatic Functions | Auto Brightness Contrast, Auto Focus, Automatic Dissipation |