Parameters
| Electro-Optical Systems | Electron Gun | Pre-aligned medium-sized fork-type tungsten filament |
| Resolution | 3.9 nm @ 20 kV (SE) | |
| 4.5 nm @ 20 kV (BSE) | ||
| Magnification | 1 x～300,000 x | |
| Acceleration Voltage | 0.5 kV ~ 20 kV | |
| Imaging Systems | Detector | Secondary Electron Detector (ETD) |
| Backscattered electron detector (BSED), energy spectrometer EDS, etc. | ||
| Image Format | TIFF, JPG, BMP, PNG | |
| Vacuum System | High Vacuum | Better than 5×10-4 Pa |
| Control Mode | Fully automated control system | |
| Pumps | Mechanical Pump ×1, Molecular Pump ×1 | |
| Sample Chamber | Camera | Optical Navigation |
| Sample Table | Two-axis automatic | |
| Distance | X: 100 mm | |
| Y: 100 mm | ||
| Software | Operating System | Windows |
| Navigations | Optical Navigation, Gesture Quick Navigation | |
| Automatic Functions | Auto Brightness Contrast, Auto Focus, Automatic Dissipation | |
| Special Functions | Intelligent Assisted Dispersion, *Large-Scale Image Stitching (Optional accessories) | |
| Installation Requirements | Space | L ≥ 3000 mm, W ≥ 4000 mm, H ≥ 2300 mm |
| Temperature | 20°C (68°F) ~ 25°C (77°F) | |
| Humidity | ≤ 50 % | |
| Power Supply | AC 220 V(±10 %), 50 Hz, 2 kVA |
